Printing Chips With Exploding Tin
Inside a chip factory, a machine the size of a bus drops balls of molten tin through a vacuum at 70 metres per second. Each ball is about 25 micrometres wide, a third the width of a human hair. A laser hits every falling droplet twice: a weak pulse flattens the droplet into a pancake, and a strong pulse blasts the pancake into a glowing plasma, many times hotter than the surface of the Sun.
An animation of the light source in an EUV machine. A tin droplet falls, a weak laser pulse flattens the droplet, a strong pulse blasts the flattened droplet into glowing plasma, and a curved mirror gathers the plasma's light and sends the light on to the next mirror. The animation plays by itself in a loop and holds for a moment on the flattened droplet and on the blast. There is nothing to press.
Text version
A nozzle at the top drops a ball of tin. A laser on the left fires along a line that passes through a hole in a curved collector mirror. As the droplet reaches the line, a weak pulse hits the droplet and squashes the droplet into a thin pancake, seen edge-on. A moment later a strong pulse hits the pancake, and the tin bursts into a small, very hot ball of glowing plasma. The plasma gives off extreme ultraviolet light in every direction. The light that reaches the curved mirror bounces off the mirror and comes together at one point to the right, then spreads out again onto the next mirror in the machine. The violet lines stand for that light, which no eye can see. The real machine repeats the double hit 50,000 times a second, and the animation slows one hit down.
The machine repeats the double hit 50,000 times every second. Each blast gives off a flash of light no eye can see, and that light prints the switches inside the chip in your phone. The finest lines it prints are several times narrower than a flu virus.
Only one company in the world, ASML in the Netherlands, builds the machine. Each one costs a couple of hundred million dollars (the price depends on the model and the year), and Intel says delivering one takes 40 freight containers and three jumbo cargo jets.
Make your guess. Why go to all this trouble just to make light?
- Ordinary light is too dim to print anything
- Ordinary light is too coarse to draw lines that thin
- Tin light is cheaper than a normal lamp
Show answer
B. Ordinary light is too coarse to draw lines that thin
Ordinary light is too coarse. Light is a wave, and a wave can only draw lines down to a fraction of its own wavelength. The tin flash has a wavelength of 13.5 nanometres, about 14 times shorter than the 193-nanometre light that prints most of a chip.
Start with what the light prints: switches. What is a switch on a chip, and why would anyone want billions of them?
Switches made of silicon
A chip is a city of tiny switches called transistors. A transistor has no moving parts. A small voltage on one terminal, the gate, opens a path for current between the other two terminals. Remove the voltage, and the path closes.
An animation of a transistor seen from the side. While the gate has a voltage on it, charges flow from the in terminal, under the gate, to the out terminal. When the gate voltage switches off, the flow stops. The animation plays by itself in a loop, switching the gate voltage on for a few seconds and then off. A label under the picture says whether the gate voltage is on or off. There is nothing to press.
Text version
A block of silicon has two regions, one under the in terminal and one under the out terminal. The gate sits above the gap between the two regions, on a thin insulating layer. When the gate voltage switches on, a thin conducting path forms in the silicon just under the gate, and charges stream down from the in terminal, across under the gate and up out of the out terminal. When the gate voltage switches off, the path disappears. The charges already past the gate leave through the out terminal, and the charges arriving from the in terminal pile up at the edge of the gap. Nothing crosses until the gate voltage switches on again.
Wire a few switches together and the switches make decisions. A few dozen can add two numbers (our page Adding With Nothing but Switches builds an adder step by step). A phone chip that plays video and recognises your face needs billions of transistors on a piece of silicon about the size of a fingernail.
So how small does each switch have to be?
Shrink the switch
Your goal: drag the slider to shrink every switch, until your 1 cm chip holds about 19 billion switches, as many as a 2023 iPhone chip.
Each time a switch gets half as wide, four times as many fit, because the switch shrinks in both directions. Ten halvings fit about a million times as many switches.
Smaller switches also flip faster and use less energy per flip. And packing more switches onto the same silicon made each switch cheaper, decade after decade.
In 1965, Gordon Moore, who later co-founded Intel, noticed that the number of transistors on a chip was doubling every year. In 1975 he changed his estimate to every two years. The prediction became known as Moore's law, and the industry kept roughly to that pace for about 50 years.
To shrink a switch, someone has to draw the switch smaller. What can draw a line 20 nanometres wide?
Drawing with light
Chips are printed a bit like photographs, a process called lithography. A mask holds the pattern for one layer of the chip, like a stencil. Light passes through the mask, and a lens shrinks the pattern four times onto a silicon disc called a wafer.
The wafer is coated with a film that changes wherever light hits the film. Washing clears away the lit parts, and the bare silicon underneath can be etched or filled. A modern chip repeats the print-and-etch steps for dozens of layers, each layer lined up with the one below to within a few nanometres.
So light is the pen. How thin a line can a pen made of light draw?
Light is a fat pen
Light is a wave, and the distance from one crest to the next is called the wavelength. A wave spreads out as the wave passes an edge, so the image of a sharp edge comes out blurred. Drawing chip lines with light is like writing tiny letters with a thick marker.
Your goal: pick a light, then drag the line width down until the printed lines fall apart. Which light draws the thinnest clean lines?
Blue-violet light from a lamp printed chips in the 1980s. Deep ultraviolet light at 193 nm, from a laser, still prints most layers of a chip today. Extreme ultraviolet light, or EUV, at 13.5 nm, prints the thinnest lines of the three.
If shorter waves draw thinner lines, why did EUV take decades to work?
Light that air swallows
EUV light is absorbed by almost everything: glass, lenses, even air. So the whole light path sits in a vacuum, and every lens is replaced by a mirror. Even the mask is a mirror.
An ordinary mirror swallows EUV too. An EUV mirror is a stack of about 40 pairs of alternating layers of molybdenum and silicon, each layer a few nanometres thick. Each layer reflects a little light, and the small reflections add up.
Zeiss, the German company that makes the mirrors, says that if one mirror were blown up to the size of Germany, the biggest bump on the mirror would be about 0.1 mm high.
The best EUV mirror keeps only about 70% of the light that hits the mirror. The light bounces off about 10 mirrors on the way to the wafer. How much of the light arrives?
- About 70%
- About 30%
- About 3%
Show answer
C. About 3%
About 3%. Each bounce keeps 70% of what is left, so ten bounces keep \(0.7^{10} \approx 0.03\) of the light. (The exact number of mirrors depends on the machine model.)
Losing 97% of the light means the source must be fiercely bright. How do you make bright EUV light?
Exploding tin
No bulb makes 13.5 nm light. A tin plasma does: a gas of tin so hot that the tin atoms lose many of their electrons. Those tin atoms glow strongly at almost exactly 13.5 nm.
Hence the falling droplets. A weak pulse flattens each droplet, and a carbon dioxide laser built by the German company Trumpf blasts the flattened droplet into plasma: about 220,000 °C, by Trumpf's figure. A curved collector mirror gathers the flash.
Your goal: press Fire when a droplet crosses the dashed laser beam. Try to hit five droplets in a row.
The real machine hits 50,000 droplets a second, hour after hour. A stream of hydrogen gas sweeps away tin dust before the dust can coat the collector mirror.
All of this, just to make a flash of light. How did one company end up as the only maker of the machine?
Thirty years to work
In the mid-1980s, Hiroo Kinoshita, a researcher at the Japanese phone company NTT, printed patterns with extreme ultraviolet light. Many experts doubted the idea would ever work in a factory. In the late 1990s, Intel and other chipmakers teamed up with US national laboratories to push EUV forward.
The light source was the hardest part. Nikon and Canon, ASML's big Japanese rivals, eventually dropped EUV, and ASML kept going. In 2012, Intel, TSMC and Samsung invested in ASML to help pay for EUV. In 2013, ASML bought Cymer, the San Diego company building the light source. The first phone chips with EUV-printed layers went on sale in 2019.
Veritasium tells the whole story, with the engineers who built the machine, in a long video. The video can't let you print a line or fire the laser, so try those in the widgets above.
So shorter light prints thinner lines. Exactly how thin can a line be?
How thin a line can be
Chip engineers use one short formula. The smallest line width depends on the wavelength \(\lambda\), on how wide a cone of light the lens can catch, called the numerical aperture (NA), and on a factor \(k_1\) for how clever the factory is:
How it really works: where the formula comes from
- A row of lines bends light. A mask with lines repeating every \(p\) nanometres splits the light into a straight beam and bent beams. The first bent beam leaves at an angle \(\theta\) with
\[ \sin\theta = \frac{\lambda}{p} \]Finer lines (smaller \(p\)) bend the light more.
- The lens catches a cone. The numerical aperture is the sine of the widest angle the lens catches: \(\mathrm{NA} = \sin\theta_{\max}\), times the refractive index of whatever fills the gap between the lens and the wafer. A bent beam outside the cone is lost.
- Two beams make an image. The lines appear on the wafer only where at least two beams meet and interfere. Tilting the incoming light lets the straight beam enter at one edge of the cone and the bent beam at the other, so the finest repeat the lens can print is
\[ p_{\min} = \frac{\lambda}{2\,\mathrm{NA}} \]One line is half a repeat, so the thinnest line is \(\lambda/(4\,\mathrm{NA})\): \(k_1 = 0.25\) is a hard floor.
- Real numbers. Factories work at \(k_1\) of roughly 0.27 to 0.4. Deep ultraviolet, with water between the lens and the wafer to push NA up to 1.35:
\[ 0.28 \times \frac{193\text{ nm}}{1.35} \approx 40\text{ nm} \]EUV, with NA 0.33:
\[ 0.35 \times \frac{13.5\text{ nm}}{0.33} \approx 14\text{ nm} \]ASML's newest "High-NA" EUV machines raise NA to 0.55, aiming at lines around 8 nm. (Published figures vary with the layer and the process.)
- Why EUV is only about 3 times better, not 14. The wavelength is 14 times shorter, but the EUV mirrors catch a narrower cone than deep-ultraviolet lenses (0.33 against 1.35). Deep ultraviolet also reaches thinner lines with tricks, such as splitting one layer's pattern across two or more printings.
- Why the toy's lines go ragged. Light arrives as packets called photons. An EUV photon carries about 14 times the energy of a 193 nm photon, so the same dose arrives as 14 times fewer photons. Fewer photons means more randomness, which shows up as rough edges and broken lines.
Where it shows up
- Your phone and laptop. The main chips in recent flagship phones and laptops have EUV-printed layers.
- AI chips. The graphics chips that train AI models are among the largest chips made, some with more than 100 billion transistors.
- Memory. Some memory chips (DRAM) use EUV for their finest layers.
- Not everything. Chips in cars, appliances and chargers mostly use older, cheaper processes with no EUV at all.
Only a few companies make the most advanced chips, mainly TSMC, Samsung and Intel, and all of them depend on ASML for EUV machines.
Your chip, explained
Now you can explain the chip in your pocket. The chip holds billions of switches, and halving a switch's width fits four times as many: you built a phone chip from a grid of sand-sized switches.
Thin lines need short waves: you watched 193 nm light blur where EUV still printed clean. EUV dies in air and in glass, so the light travels through a vacuum off layered mirrors that lose about 97% of the light.
To make up for the loss, the machine blasts 50,000 tin droplets a second, a job you tried by hand. That chain of hard problems is why one company builds the machine.
Where to go next
EUV opens a lot of other questions:
- Is Moore's law over, or just slowing down?
- What happens when a transistor is so small that electrons leak straight through the transistor's walls?
- If switches can't shrink much more, how will chips keep getting faster?
- Why are most of the world's most advanced chips made in Taiwan?
- How does a chip factory keep out dust that would ruin a 20 nm line?
Ask Phy
- Walk me through every step of making one layer of a chip, from a bare wafer to an etched pattern.
- Why does putting water between the lens and the wafer let 193 nm light print thinner lines?
- What is a gate-all-around transistor, and why are chipmakers switching to it?